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Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection

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6 Author(s)
Caboni, A. ; Dept. of Electr. & Electron. Eng., Univ. of Cagliari, Cagliari ; Barbaro, M. ; Homsy, A. ; van der Wal, P.
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This paper describes the fabrication technique for the realization a microfluidic flow cell to be integrated on a CMOS biosensor for DNA hybridization detection. The main element of the microfluidic system is made in polydimethylsiloxane (PDMS) elastomer and takes up an area of 5 mm2. PDMS is cast against a silicon master patterned by deep reactive ion etching (DRIE) and then bonded on the chip by means of oxygen plasma activation. The micro channels patterned in the flow cell are connected with capillary tubes that can be easily interconnected to a common syringe.

Published in:

Research in Microelectronics and Electronics, 2008. PRIME 2008. Ph.D.

Date of Conference:

June 22 2008-April 25 2008