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Improvements to a Range Management System in an Automated Wafer Fabrication Fab

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1 Author(s)
Shikalgar, S.T. ; IBM Syst. & Technol. Group, Hopewell Junction

The Range Management system was implemented in IBM's 300 mm fab located in Hopewell Junction, NY. The fab processes a diverse mix of low and high volume production technologies in conjunction with processing development hardware for future technologies. The implementation of the Range Management system was modified to take advantage of the automated functioning of the fab which has resulted in substantial productivity improvements.

Published in:

Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI

Date of Conference:

11-12 June 2007

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