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Integrated Targeting, Near Real-Time Scheduling, and Dispatching with Automated Execution in Semiconductor Manufacturing

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6 Author(s)
Nirmal Govind ; Intel Corporation, Chandler, AZ 85226, U.S.A. ; Eric W. Bullock ; Linling He ; Bala Iyer
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To help address the need for manufacturing cycle time reduction, Intel has adopted an integrated approach that consists of three key components - targeting, near real-time scheduling, and dispatching - that work in conjunction to maximize fab efficiency. Combined with fully automated execution, this approach allows Intel to execute to a coordinated operational management philosophy at its fabrication facilities. OPSched was developed at Intel to fulfill the requirements of the integrated approach. We look at an implementation of the OPSched system at one of Intel's high volume manufacturing facilities and the results achieved.

Published in:

2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference

Date of Conference:

11-12 June 2007