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There are many possibilities of faults in motion systems which are related to driver equipments, based on the torque monitor signal supplied by systemic driver, a new fault diagnosis method was brought forward which was profited from a nonlinear energy operator. The principles of using it to performing fault diagnosis were presented, the keynotes about its application were also analyzed, and the detail flow chart of diagnosis was given. After the software simulation using Matlab and diagnosing experiments on X-Y-Z motion platform under numeric control arithmetic, the validity of this method was proved. Aiming at different kinds of energy functions and the choices of their parameters, after particular analysis, some guidelines about fault diagnosis are concluded.