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Research of control system platform technology for IC equipment

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4 Author(s)
Mingzhe Liu ; Shenyang Inst. of Autom., Chinese Acad. of Sci., Shenyang ; Aidong Xu ; Haibin Yu ; Hong Wang

With the development of road to 300 mm semiconductor wafer manufacturing, IC equipment control system not only implement its task scheduling, material transfer and process control, we must also consider the enterprise information integration, production scheduling and industry standards. This paper analyzes the semiconductor manufacturing process, control requirements, and presents a framework-style, modular IC equipment control system platform model, aimed at the complete system control functions at the same time, making the control of the semiconductor equipment greater flexibility, scalability, enterprise-class interactive capabilities, and in accordance with industry standards.

Published in:

Intelligent Control and Automation, 2008. WCICA 2008. 7th World Congress on

Date of Conference:

25-27 June 2008