By Topic

Near-field Scanning Optical Microscopy — Breaking the diffraction limit using nano light emitting probe tip

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Xiaojing Zhang ; Dept. of Biomed. Eng., Univ. of Texas at Austin, Austin, TX ; Hoshino, Kazunori ; Vanden Bout, D.A.

We describe optical and topographic imaging using a light emitting diode (LED) monolithically integrated on a silicon probe tip for Near-field Scanning Optical Microscopy (NSOM). The light emission resulted from a silicon dioxide layer buried between a phosphorus-doped N+ silicon layer and a gallium-doped P+ silicon region created locally at the tip by a focused ion beam (FIB). The tip was employed in a standard NSOM excitation setup. The probe successfully measured optical as well as topographic images of a chromium test pattern with imaging resolutions of 400 nm and 50 nm, respectively. The directional resolution dependence of the acquired images directly corresponds to the shape, size and polarity of the light source on the probe tip. To our knowledge, this report is the first successful near-field imaging result directly measured by such tip-embedded light sources.

Published in:

IEEE/LEOS Summer Topical Meetings, 2008 Digest of the

Date of Conference:

21-23 July 2008