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Design and fabrication of a MEMS thermal actuator for 3D optical switching applications

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4 Author(s)
Varona, J. ; Centro de Investig. en Ing. y Cienc. Aplic., Univ. Autonoma del Estado de Mexico (UAEM), Toluca ; Tecpoyotl-Torres, M. ; Escobedo-Alatorre, J. ; Hamoui, A.A.

This paper presents a novel thermally-actuated vertical micromirror for optical communications. Fabricated in a standard surface micromachining process, this micromirror can achieve low insertion loss (< 1 dB) and is capable of operating at CMOS-compatible voltage levels. It has a measured maximum power consumption of only 50-mW and a switching speed in the order of 16 ms with 5-V drive.

Published in:

IEEE/LEOS Summer Topical Meetings, 2008 Digest of the

Date of Conference:

21-23 July 2008