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Design and fabrication of a MEMS thermal actuator for 3D optical switching applications

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4 Author(s)
Jorge Varona ; Centro de Investigación en Ingenieróa y Ciencias Aplicadas, UAEM, México ; Margarita Tecpoyotl-Torres ; Jesus Escobedo-Alatorre ; Anas A. Hamoui

This paper presents a novel thermally-actuated vertical micromirror for optical communications. Fabricated in a standard surface micromachining process, this micromirror can achieve low insertion loss (< 1 dB) and is capable of operating at CMOS-compatible voltage levels. It has a measured maximum power consumption of only 50-mW and a switching speed in the order of 16 ms with 5-V drive.

Published in:

2008 Digest of the IEEE/LEOS Summer Topical Meetings

Date of Conference:

21-23 July 2008