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Equipment Throughput Optimization by Means of Speed Loss Analysis

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5 Author(s)

Consistent with the semiconductor industry's focus on continuous improvement, increased throughput, and shorter cycle times, this paper describes a methodology for the qualification and quantification of speed loss at a toolset level. The identification and quantification of the speed loss categories, along with implementation of specific actions targeted at these losses, has enabled our fab to have a direct impact on overall capacity and throughput performance of our toolsets.

Published in:

IEEE Transactions on Semiconductor Manufacturing  (Volume:21 ,  Issue: 3 )