94 GHz Voltage Controlled Oscillator With 5.8% Tuning Range in Bulk CMOS

A 94 GHz fundamental mode voltage controlled oscillator (VCO) is demonstrated using low leakage transistors in a 65 nm digital CMOS process with six metal layers. It achieves a tuning range of 5.8% and phase noise of -106 dBc/Hz at 10 MHz offset from a 94.9 GHz carrier. The output power varies between -4 and -8 dBm over the tuning range. The VCO draws 6 mA bias current from a 1.5 V supply and 6 mA from a 0.8 V supply.