By Topic

Silicon smart microchips for intelligent sensing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
M. Ishida ; Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Hibarigaoka 1-1, Tempaku-cho, 441-8250, Japan ; T. Kawano ; H. Takao ; K. Sawada

Silicon smart microchips with CMOS/MEMS technology are realized for intelligent sensing. In our developed chips, tow new type sensor chips are presented here. One is Si microprobe electrode array for using in the recording of neurons in the tissue. The probe array can be fabricated on IC chip, using standard IC process followed by a selective Si probe growth. Another one is pH image sensors successfully fabricated by using the CCD/CMOS image sensor technique, and real time imaging of a chemical reaction and pH distribution imaging was demonstrated.

Published in:

2008 Symposium on VLSI Technology

Date of Conference:

17-19 June 2008