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EMMI analysis on silicon solar cell

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5 Author(s)
Yeh, B. ; Mater. Anal. Technol. Inc., Hsinchu ; Huang, R. ; Chung, K. ; Chang, A.
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This work utilized the EMMI as a tool for investigation of the junction leakage of crystalline silicon solar cell under reverse bias and forward bias. The defected areas were examined by the TEM to reveal the physical structure. In addition, analysis of physical structure and component of the solar cell were demonstrated by using common PFA tools, such as OM, SEM, EDX, FIB, and TEM.

Published in:

Physical and Failure Analysis of Integrated Circuits, 2008. IPFA 2008. 15th International Symposium on the

Date of Conference:

7-11 July 2008

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