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Fabrication of SWNT device by self-assembly technology

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6 Author(s)
Yanyan Wang ; National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro/Nanometer Science & Technology, Shanghai Ran Tong University, 200030, China ; Liyue Liu ; Hai Liu ; Ying Wang
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The single-walled carbon nanotubes (SWNTs) were randomly deposited on pre-treated silicon substrate by a self-assembling method. By this method, the SWNTs film with uniform distribution and random structure were formed and the density of SWNTs could be controlled by the concentration of the SWNTs suspension and the assembling time. Also, Cr interdigitated electrodes were patterned on the assembled SWNTs by traditional lift-off process. The results show that SWNTs films made by self-assembly can adhere firmly to the substrate.

Published in:

2008 2nd IEEE International Nanoelectronics Conference

Date of Conference:

24-27 March 2008