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A simple method to fabricate silicon nanowires arrays by a catalytic electrochemical etching process

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4 Author(s)
Xiaocheng Li ; Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore ; Beng Kang Tay ; Guofeng You ; Yi Yang

We present a simple method to fabricate large area of silicon nanowires array with low-cost and throughput by a catalytic electrochemical etching process. In our experiment, a thin layer of polyelectrolyte (PAH) was used to absorb negatively charged PS sphere. Using the PS sphere as mask, the silicon nanowires arrays were fabricated by a silver catalytic electrochemical etching process. By SEM and Raman spectrum, the structure and properties of silicon nanowires arrays were also studied.

Published in:

Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International

Date of Conference:

24-27 March 2008