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Channel waveguide formed by “One Shot” implantation of He+ ions

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5 Author(s)
Ilan, Har'el ; Dept. of Appl. Phys., Hebrew Univ. of Jerusalem, Jerusalem ; Gumennik, A. ; Perepelitsa, Galina ; Israel, A.
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Channel waveguide was fabricated in a KLTN crystal. The waveguide was produced by a selective implantation of He+ ions into the crystal through a gold stopping mask, which created a trough shaped cladding.

Published in:

Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on

Date of Conference:

4-9 May 2008