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Demonstration of an electronic photonic integrated circuit in a commercial scaled bulk CMOS process

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13 Author(s)
Orcutt, J.S. ; Massachusetts Inst. of Technol., Cambridge, MA ; Khilo, A. ; Popovic, M.A. ; Holzwarth, C.W.
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We demonstrate the first photonic chip designed in a commercial bulk CMOS process (65 nm node) using standard process layers combined with scalable post-processing, enabling dense photonic integration with high-performance microprocessor electronics.

Published in:

Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on

Date of Conference:

4-9 May 2008