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Fabrication and investigation of photonic crystal device with MEMS activated defects insertion

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4 Author(s)
Monica Taysing-Lara ; U.S. Army Research Laboratory, Sensors and Electron Devices Directorate, 2800 Powder Mill Road, Adelphi, MD 20783, USA ; Gerard Dang ; Stefan Svensson ; Weimin Zhou

A GaAs/AlGaAs-based photonic-crystal device with MEMS activated insertion/removal of defect posts into/from sub-micron photonic-crystal holes has been fabricated and investigated. This allows the device to actively create/remove point resonators or waveguides in the photonic-crystal membrane.

Published in:

Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on

Date of Conference:

4-9 May 2008