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Novel Gate-All-Around Poly-Si TFTs With Multiple Nanowire Channels

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8 Author(s)
Ta-Chuan Liao ; Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu ; Shih-Wei Tu ; Yu, M.H. ; Wei-Kai Lin
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The novel gate-all-around (GAA) poly-Si thin-film transistors (TFTs) with multiple nanowire channels (MNCs) have been, for the first time, fabricated using a simple process to demonstrate high-performance electrical characteristics and high immunity to short-channel effects (SCEs). The nanowire channel with high body-thickness-to-width ratio (TFin/WFin), which is approximately equal to one, was realized only with a sidewall-spacer formation. Moreover, the unique suspending MNCs were also achieved to build the GAA structure. The resultant GAA-MNC TFTs showed outstanding three-dimensional (3-D) gate controllability and excellent electrical characteristics, which revealed a high on/off current ratio ( > 108), a low threshold voltage, a steep subthreshold swing, a near-free drain-induced barrier lowering, as well as an excellent SCE suppression. Therefore, such high-performance GAA-MNC TFTs are very suitable for applications in system-on-panel and 3-D circuits.

Published in:

Electron Device Letters, IEEE  (Volume:29 ,  Issue: 8 )