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Lumped Elastodynamic Model for MEMS: Formulation and Validation

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3 Author(s)
Cardou, Philippe ; Dept. of Mech. Eng., Laval Univ., Montreal, QC ; Pasini, D. ; Angeles, J.

Proposed in this paper is a symbolic linearly elastodynamic model for the analysis and synthesis of microelectromechanical system. In particular, the strain energy in the compliant links is computed from the results of a previous work, by representing beam deflections with small-displacement screws. This allows for a systematic coherent approach based on screw theory. Two case studies are proposed to illustrate the application of the model. In the first example, the elastodynamic model of a simple accelerometer is derived and compared to one available in the literature. In the second example, a complex accelerometer is modeled, fabricated, and tested. Comparison between the simulated results and data from the literature or obtained experimentally shows the accuracy of the proposed model.

Published in:

Microelectromechanical Systems, Journal of  (Volume:17 ,  Issue: 4 )

Date of Publication:

Aug. 2008

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