stract-Fe multilayered films with FexN intermediate layers of various structures (Fe+Fe4N, +Fe4N, Â¿ and Fe2N) were prepared by reactive sputtering under various nitrogen partial pressure conditions. The effects of the FexN intermediate layers on the coercivity (Hc), saturation magnetization (Bg), and, structure of the Fe/FexN multilayered films were investigated. Fe/FexN multilayered films with intermediate layers prepared under conditions in which a single-layer Fe2N film is obtained have a low Hc of less than 1 Oe. We found that the columnar growth of the Fe layers is interrupted in these films, grain sizes were reduced to less than 100 Ã
, and the lattice spacing of the -Fe (110) planes was increased. The low Hc of Fe/FexN multilayered films is attributed to these factors.