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Substrate Temperature Effect on Magnetic Properties and Microstructure of Vacuum Deposited Co-Cr Films

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6 Author(s)
Tohma, K. ; Matsushita Electric Industrial Co., Ltd. ; Sugita, R. ; Honda, K. ; Akutagawa, R.
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The authors investigated the effect of substrate temperature and substrate thickness on the magnetic properties and microstructure of vacuum-deposited Co-Cr films. The microstructure of films is sufficiently dependent on the substrate temperature that the columnar structure disappears as the temperature rises from 250°C to 290°C, causing deterioration of the film recording characteristics. The substrate thickness dependence of the film magnetic properties is small; this result is consistent with simulations of the thickness dependence of the substrate temperature during deposition.

Published in:

Magnetics in Japan, IEEE Translation Journal on  (Volume:5 ,  Issue: 10 )

Date of Publication:

Oct. 1990

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