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The purpose of this experiment with the Fe-Si-Al thin film as an ordered structural alloy and the Fe-Ni-Nb thin film as a disordered structural alloy is to clarify the quantitative relationships and to improve the fabrication techniques in order to achieve improved soft magnetic properties. Thus, we examined in detail: 1) Concentration dependence of coercive force Hc and the effective permeability μeff. Furthermore, the relationship between μeff and the magnetocrystalline anisotropy and film magnetostriction. 2) The relationship between soft magnetic properties and the magnetic anisotropy field Hk, and the magnitude of long and short period local anisotropy fluctuation determined by the measurements of the dynamic differential susceptibility measurement. 3) The changes of μeff, Hk and long and short period local anisotropy fluctuation on a decrement of film thickness, in addition, the relationship between these amounts and K1 and λ.