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Vacuum MEMS sensor based on thermopiles - simple model and experimental results

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5 Author(s)
Randjelovic╠ü, D. ; IHTM - Inst. of Microelectron. Technol. & Single Crystals, Univ. of Belgrade, Belgrade ; Jovanov, V. ; Lazic, Z. ; Djuric, Z.
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This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p+Si/Al thermocouples and p+Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10-3-105) Pa. Experimental results were compared with theoretical predictions.

Published in:

Microelectronics, 2008. MIEL 2008. 26th International Conference on

Date of Conference:

11-14 May 2008