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Broadband Permittivity Extraction from On-Wafer Scattering-Parameter Measurements

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2 Author(s)
U. Arz ; Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany ; J. Leinhos

We examine a broadband method to extract the dielectric constant and loss tangent of low-loss substrate materials from on-wafer scattering-parameter measurements of coplanar waveguides of different lengths. We compare against multiple-frequency measurements performed with a commercially available split-cylinder resonator and show good agreement over a broad frequency range for AF45 and alumina substrates.

Published in:

Signal Propagation on Interconnects, 2008. SPI 2008. 12th IEEE Workshop on

Date of Conference:

12-15 May 2008