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Effect of Drift-Region Concentration on Hot-Carrier-Induced R_{\rm on} Degradation in nLDMOS Transistors

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5 Author(s)
Chen, Jone F. ; Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan ; Lee, J.R. ; Kuo-Ming Wu ; Huang, Tsung-Yi
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In this letter, hot-carrier-induced on-resistance (Ron) degradation in lateral DMOS transistors with different n-type drift-drain (NDD) region concentration is investigated. Increasing NDD concentration results in greater bulk (Ib) and gate currents (Ig), but Ron degradation is improved. Technology computer-aided design simulations reveal that high NDD concentration increases impact-ionization rate in accumulation (related to Ib increase) and channel regions (related to Ig increase) but reduces impact-ionization rate in spacer region. Charge-pumping data confirm that hot-carrier-induced interface state created in the spacer region is reduced, leading to improved Ron degradation in high-NDD-concentration device.

Published in:

Electron Device Letters, IEEE  (Volume:29 ,  Issue: 7 )