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Phased antenna array (PAA) systems play an important role in modern radar and communication technologies. In order to satisfy the broadband requirement of future PAA systems, a true time delay approach is preferred over phase delay approaches. Several true time delay methods for PAA beam steering and beam shaping are compared at K-Band and Ka-Band frequencies. Fabrication details and test results for Ka- Band micro-electro-mechanical systems (MEMS) based true time delay lines are presented.