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Design of Integrated RF Modules with Process Control Monitors on Liquid Crystalline Polymer Substrates for Large Volume Manufacturing

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6 Author(s)
Chung-Seok Seo ; Jacket Micro Devices, Inc., Atlanta, GA 30308 USA. andyseo@jacketmicro.com ; Sung-Hwan Min ; Chris Ward ; Peter Wallace
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In this paper, we present process control monitor (PCM) design and analysis for integrated RF modules. Through PCM integration, the measured substrate yield of the devices was greater than 90% which also agreed with the Monte Carlo simulations.

Published in:

2007 Asia-Pacific Microwave Conference

Date of Conference:

11-14 Dec. 2007