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Browse Journals & Magazines > Magnetics in Japan, IEEE Tran ...> Volume:1 Issue:4 Help

Magnetic Properties of Permalloy Films By High-Rate Triode Sputtering

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3 Author(s)
Minakata, R. ; Sharp Corp., Central Research Lab., Tenri. ; Kira, T. ; Yoshikawa, M.

Permalloy film was formed by triode sputtering and vacuum-annealed in a magnetic field (150 Oe), and changes in magnetic properties induced by the annealing were studied. The as-sputtered films had a uniaxial magnetic anisotropy, and except for the crystal orientation, films changed little with different sputtering conditions (voltage, Ar pressure). As a result of magnetic field annealing, the film uniaxial anisotropy was maintained up to 300°C, but above 400°C the HcH increased, the anisotropy was lost and soft magnetic characteristics deteriorated. This was attributed to formation of a regular lattice.

Published in:
Magnetics in Japan, IEEE Translation Journal on  (Volume:1 ,  Issue: 4 )

Date of Publication: July 1985

Page(s):
500 - 501
ISSN :
0882-4959
Digital Object Identifier :
10.1109/TJMJ.1985.4548838
Product Type:
Journals & Magazines
Date of Current Version :
24 June 2008
Issue Date :
July 1985

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