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Fabrication of hydrogen sensors based on array of palladium nanowires onto silicon substrate with interdigitated electrodes is reported. Two series of devices, where Pd-sensing elements are assembled by dielectrophoresis, are fabricated and electrically characterized under 4% hydrogen at room temperature. Their electrical responses are analyzed and compared to investigate the effect of nanowire thickness and surface morphology on sensitivity and response time. We have found thinner nanowires are more sensitive and their response time is shorter than thicker ones.