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An Integer Linear Programming Approach for Dedicated Machine Constraint

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3 Author(s)
Huy Nguyen Anh Pham ; Dept. of Comput. Sci., Louisiana State Univ., Baton Rouge, LA ; Arthur Shr ; Peter P. Chen

Dedicated machine constraint is one of the new challenges introduced in photolithography machinery of the semiconductor manufacturing system due to natural bias. Previous researches either did not take the constraint into account or the proposed heuristic approach might not fit the fast-changing market of semiconductor manufacturing. In this paper, we propose a new framework for the issue of the dedicated machine constraint in semiconductor manufacturing based on an Integer Linear Program (ILP) framework. The ILP framework provides an efficient approach to minimize the producing cost and obtain a global optimal solution in an efficient time. We also present the experiments to validate the proposed approach.

Published in:

Computer and Information Science, 2008. ICIS 08. Seventh IEEE/ACIS International Conference on

Date of Conference:

14-16 May 2008