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Microchannel-Based Refractive Index Sensors Monolithically Integrated With Silica Waveguides: Structures and Sensitivities

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4 Author(s)

Refractive index sensors using self-forming microchannels embedded in borophosphosilicate glass and monolithically integrated with silica waveguides are presented. Fabricated devices presented include solid-core and liquid-core directional couplers, liquid-core modal interferometers, Mach-Zehnder interferometers, segmented waveguides, and microchannel grating devices. Sensitivities of these devices are calculated and compared with each other and to other well-known devices. Experimental characterizations show that the performance of fabricated devices agrees well with calculations.

Published in:

IEEE Sensors Journal  (Volume:8 ,  Issue: 5 )