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A 5- \mu m-Thick SOI Waveguide With Low Birefringence and Low Roughness and Optical Interconnection Using High Numerical Aperture Fiber

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1 Author(s)
Shih-Hsiang Hsu ; Dept. of Electron. Eng., Nat. Taiwan Univ. of Sci. & Technol., Taipei

A 5-m-thick silicon-on-insulator waveguide possessing low birefringence of and 9-nm lithography roughness is investigated using arrayed waveguide grating and an atomic force microscope. Instead of complex processing using a 3-D mode size converter, the high numerical aperture fiber is utilized as the bridge between the corresponding waveguide and single-mode fiber (SMF-28) to obtain a competitive coupling loss of 0.4 dB.

Published in:

IEEE Photonics Technology Letters  (Volume:20 ,  Issue: 12 )