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Microelectrode arrays (MEAs) have become key components in retinal implants for recording of neural signals or electrical stimulation of nerves. In this paper, implantable flexible MEAs based on a novel polymer, parylene, were developed by designing MEMS process. And electrical performance of prepared microelectrodes was characterized electrochemically. Results showed that impedance and phase delay of testing MEAs were 2000 Omega~100 Omega and -20deg from 103 Hz to 105 Hz, respectively, which would supply a better application with neural interface for retinal prosthesis.
Date of Conference: 6-8 April 2008