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In recent years the MEMS market has grown rapidly. In parallel, design methodologies have developed in order to fulfil increasing design requirements. A finite-element- method analysis plays a key role in today's designer work. Even though, in case of some multi-domain systems such as micro pressure sensors, a FEM analysis is used at the beginning of the project, such an approach could be inefficient because even a simple multi-domain analysis could be very time consuming. Thus, in order to perform fast and reliable analysis which gives the designer an overview of sensor's performance, an analytical model may be a solution. In this paper, a fast, dedicated tool for micromachined pressure sensor design based on analytical models is presented.
Date of Conference: 20-23 April 2008