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This paper deals with the coupled electrostatic- mechanical analysis of electrostatically actuated MEMS. An iterative perturbation procedure in conjunction with the finite element method is used to solve the coupled problem without the need of remeshing the whole electric domain. The method offers the advantage of overcoming degenerated finite elements in the mesh of some electric regions where the deflection of the MEMS moving parts is critical. The actuation of such systems is achieved by applying either an electric voltage or a global charge.
Date of Conference: 20-23 April 2008