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Thickness dependence of electrical properties of PZT films deposited on metal substrates by laser-assisted aerosol deposition

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3 Author(s)
Baba, S. ; Adv. Manuf. Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba ; Tsuda, Hiroki ; Akedo, J.

Dependence of electrical properties-dielectric, ferroelectric, and piezoelectric properties-on film thickness was studied for lead-zirconate-titanate (PZT) thick films directly deposited onto stainless-steel (SUS) substrates in actuator devices by using a carbon dioxide (CO2), laser-assisted aerosol deposition technique. Optical spectroscopic analysis data and laser irradiation experiments revealed that absorption at a given wavelength by the film increased with increasing film thickness. Dielectric constant epsiv, remanent polarization value Pr, and coercive field strength Ec of PZT films directly deposited onto a SUS-based piezoelectric actuator substrate annealed by CO2 laser irradiation at 850degC improved with increasing film thickness, and for films thicker than 25 mum, e > 800, Pr > 40 muC/cm2, and Ec < 45 kV/cm. In contrast, the displacement of the SUS-based actuator with the laser-annealed PZT thick film decreased with increasing film thickness.

Published in:

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:55 ,  Issue: 5 )

Date of Publication:

May 2008

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