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Nanostructured Silicon for Optical Biosensors

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7 Author(s)
Miu, M. ; Nat. Inst. for R&D in Microtechnologies, Bucharest ; Kleps, I. ; Pavesi, Lorenzo ; Craciunoiu, F.
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A new silicon (Si) based transducer containing an assembly of microstructures (pyramidal and prismatic) and nanostructured elements (porous silicon) is proposed for future integration in a complex optical biosensor device. The morphology of the experimental structures was investigated using different microscopic techniques and optical properties were studied by photoluminescence (PL) measurements.

Published in:

Semiconductor Conference, 2007. CAS 2007. International  (Volume:2 )

Date of Conference:

Oct. 15 2007-Sept. 17 2007