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Some Contributions to the Understanding of the Puzzle of Physical Processes of Degradation in Irradiated Silicon

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3 Author(s)
Lazanu, S. ; Nat. Inst. of Mater. Phys., Bucharest ; Lazanu, I. ; Ciurea, M.L.

In the present paper, we intend to bring some clarifications related to the role played by primary defects in long term degradation, to the dependence of degradation on the orientation of the wafer, as well as on the spatial distribution of the degradation produced by low energy particle irradiation.

Published in:

Semiconductor Conference, 2007. CAS 2007. International  (Volume:2 )

Date of Conference:

Oct. 15 2007-Sept. 17 2007