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Simulation and Design of a Microcantilever for Biosensing Application

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3 Author(s)
Ion, M. ; Nat. Inst. for R&D in Microtechnol., Bucharest ; Pachiu, C. ; Moldovan, C.

Microcantilevers with very small mass and dimensions can detect mass changes at individual molecules level. Therefore, the paper is dedicated to cantilever sensor design optimization. The simulations of the cantilever in the static mode have been performed in order to evaluate the sensitivity of the device at very low mass lauding (ng) cantilever based. The biosensor proves specificity, works in real time and in different environment conditions. The simulations have the role to optimize the dimensions of the cantilevers and to minimize the number of the experiments.

Published in:

Semiconductor Conference, 2007. CAS 2007. International  (Volume:1 )

Date of Conference:

Oct. 15 2007-Sept. 17 2007