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An implantable probe fabricated on a silicon substrate for electrical activity monitoring of living tissues was developed and fabricated. In order to improve the mechanical resistance and biocompatibility of the device, the technology of thermionic vacuum arc (IVA) deposition was used for coating the implantable parts with diamond like carbon (DLC) with zero stress (OSC), at the end of silicon processing steps. The paper presents the design and manufacturing steps of an DLC based8-channel microprobefor recording the electrical activity of neural cells and tissues. The specific fabrication processes of the integrated microprobe are presented. The microprobe was packaged using gold wire bonding, in order to allow the electrical signals reading and processing. The electronics implemented on the board accomplish the separation and reduction of the biological noise recording. The microprobe functionality was tested in vivo and in vitro, in specialized laboratories, by recording electrical signals from cells cultures and mice organs. Biocompatibility tests were performed on implantable microprobes, coated with DLC/OSC, introduced in cells cultures. The integrated microprobe for monitoring tissues electrical activity can be used in laboratories and research centres acting in the biomedical field, which study the cells growth and their response to physico-chemical stimuli, in hospitals and treatment centres for people suffering from neurological diseases.
Semiconductor Conference, 2007. CAS 2007. International (Volume:1 )
Date of Conference: Oct. 15 2007-Sept. 17 2007