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Single photon avalanche photodetector with integrated quenching fabricated in TSMC 0.18 μm 1.8 V CMOS process

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2 Author(s)
Marwick, M.A. ; Dept. of Electr. & Comput. Eng., Johns Hopkins Univ., Baltimore, MD ; Andreou, A.G.

The design and testing of a single photon avalanche detector with integrated quenching circuit fabricated in the TSMC 0.18 mum CMOS technology are reported. A 78 mum device exhibits an average dark count rate of 100 counts/s without cooling. Photon detection probability of approximately 14% is measured at 670 nm.

Published in:

Electronics Letters  (Volume:44 ,  Issue: 10 )