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This letter presents a 60-GHz millimeter-wave on-chip Yagi antenna fabricated with a 0.18-mum CMOS process. A feeding network is designed in a coplanar waveguide (CPW) technology. The 0.18-mum six-metal-layer CMOS process allows the on-chip antenna to utilize a simple CPW-to-coplanar-stripline feed transition and the first metal layer to implement a reflector strip. The CMOS antenna chip size is 1.1 x 0.95 mm2 . A FEM-based 3D full-wave electromagnetic solver, the HFSS, is used for design simulation. The measured antenna input VSWR is less than two from 55 to 65 GHz. The front-to-back ratio of the Yagi antenna is about 9 dB. The measured maximum antenna power gain is about -10 dBi. The simulated antenna radiation efficiency is about 10%.