By Topic

Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)

In this letter, a silicon suspended grating without a substrate is fabricated using micro- and nanolithography technologies. Experimental measurements reveal that it serves as a microoptical filter, which is due to guided mode resonance effect of the grating. Theoretical calculations by a rigorous coupled wave method prove to be in agreement with the experimental observations.

Published in:

Photonics Technology Letters, IEEE  (Volume:20 ,  Issue: 10 )