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Advanced CD Control Technology for 65-nm Node Dual Damascene Process

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6 Author(s)
Nagase, M. ; NEC Electron. Corp., Sagamihara ; Maruyama, T. ; Iguchi, M. ; Suzuki, M.
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This paper describes an advanced CD control technology for 65-nm node dual damascene process and beyond. Our newly developed DESE (deposition enhanced shrink etching) technology realizes not only dynamic via shrink ranged 40nm but also accurate trench CD control by feed-forward technology. This technology has been performed for 65-nm Cu/Low-k interconnects using porous CVD SiOC.

Published in:

Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on

Date of Conference:

25-27 Sept. 2006

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