By Topic

A Large-Stroke MEMS Deformable Mirror Fabricated by Low-Stress Fluoropolymer Membrane

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Tyng-Yow Chen ; Nat. Taiwan Univ., Taipei ; Chen-Wei E. Chiu ; Guo-Dung J. Su

This letter presents a deformable mirror (DM) which consists of a 25-mm square flexible membrane and an array of 67 hexagonal electrodes that can pull down a membrane by electrostatic force. The membrane is a 2.15-mum-thick fluoropolymer film and is bonded to an electrode substrate with an 80-mum-thick adhesive acrylic spacer. The fabrication process is completed by a microelectromechanical systems batch process. The surface roughness of polymer membrane is approximately 41 nm. The device demonstrated maximum 38-mum center deflection by applying 250 V because of small residual stress (2.2 MPa) and low Young's modulus (15 GPa) of fluoropolymer film. The response time of the DM is experimentally demonstrated around 10 ms in atmosphere. The proposed device is suitable for large stroke and low sampling rate applications.

Published in:

IEEE Photonics Technology Letters  (Volume:20 ,  Issue: 10 )