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Monolithic Resonant-Cantilever-Based CMOS Microsystem for Biochemical Sensing

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5 Author(s)
Yue Li ; Phys. Electron. Lab., ETH Zurich, Zurich ; Vancura, C. ; Kirstein, K.-U. ; Lichtenberg, Jan
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A resonant cantilever-based microsystem aimed at biochemical sensing is presented. The sensor system comprises a magnetically actuated resonant cantilever sensor array integrated with the feedback circuitry, digital control circuitry and a serial interface on a single chip in 0.8 mum CMOS technology. The sensor system shows a frequency stability of better than 3 Hz in water corresponding to a detection limit of about 30 pg mass loading. The system has been used for the detection of antibody-antigen interaction on the cantilever surface. The possibility to actuate and operate cantilever arrays in a liquid environment opens up a variety of new applications for bio-chemical sensing.

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Circuits and Systems I: Regular Papers, IEEE Transactions on  (Volume:55 ,  Issue: 9 )