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Flatness-based control of an electrostatic torsional micro-mirror with voltage feedback

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4 Author(s)
Agudelo, C.-G. ; Ecole Polytech. de Montreal, Montreal ; Zhu, G. ; Packirisam, M. ; Saydy, L.

Electrostatic micro-mirrors are typically modelled in terms of the tilt angle, the angular velocity, and the electrical charge on the device. Although from a theoretical point of view this is a convenient choice, it is not practical due to the ensuing low resolution and the complexity of implementation related to charge measurement. The present paper addresses the practical control of a micro-mirror with the voltage across the device as a state variable. The technique of flat systems is employed to construct a closed-loop scheme for tracking control. Experimental testing results conducted on a scanning micro-mirror demonstrate that the developed control scheme can achieve good performance.

Published in:

Circuits and Systems, 2007. MWSCAS 2007. 50th Midwest Symposium on

Date of Conference:

5-8 Aug. 2007