Optical Channel Waveguides in
Crystal Produced by Proton Implantation
We reported on, to our knowledge the first time, the channel waveguide formation in KTiOPO4 crystal by the implantation of protons with a special designed photoresist mask. The 2-D refractive index profile was constructed according to the measured dark-mode spectroscopy (for longitudinally planar configuration) as well as the shape of the channel waveguide cross section. Based on this index distribution, the modal profile was calculated through a numerical simulation, which showed reasonable agreement with the near-field light intensity distribution of the guided mode that was obtained by an end-coupling method. After annealing at 200deg C for 30 min in air, propagation loss of the channel waveguides was determined to be as low as ~2.9 dB/cm at wavelength of 632.8 nm.
Published in:
Lightwave Technology, Journal of
(Volume:26
,
Issue:
10
)
Date of Publication: May15, 2008