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Microfluidic chip fabrication for silicon mold insert by micro hot embossing

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7 Author(s)
Yung-Hsun Shin ; Sch. of Dentistry, Taipei Med. Univ., Taipei ; Yung-Kang Shen ; Yi Lin ; Jeou-Long Lee
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This study uses the microfluidic chip as an example to discuss its properties using silicon mold insert by micro hot embossing molding. This study uses the lithography technology to fabricate the silicon mold insert. In this study, the authors use the Taguchi method (L9 table) to discuss the different processing parameters for the properties of molded microfluidic chip. The results show that the most important parameter is the embossing temperature for replication properties of molded microfluidic chip and the de-molding temperature is most important parameter for surface roughness for molded microfluidic chip.

Published in:

Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on

Date of Conference:

6-9 Jan. 2008