Cart (Loading....) | Create Account
Close category search window

An MILP-based wire spreading algorithm for PSM-aware layout modification

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Ming-Chao Tsai ; Nat. Tsing Hua Univ., Hsinchu ; Yung-Chia Lin ; Ting-Chi Wang

Phase shifting mask (PSM) is a promising resolution enhancement technique, which is used in the deep sub-wavelength lithography of the VLSI fabrication process. However, applying the PSM technique requires the layout to be free of phase conflicts. In this paper, we present a mixed integer linear programming (MILP) based layout modification algorithm which solves the phase conflict problem by wire spreading. Unlike existing layout modification methods which first solve the phase conflict problem by removing edges from the layout-associated conflict graphs and then try to revise the layout to match the resultant conflict graphs, our algorithm simultaneously considers the phase conflict problem and the feasibility of modifying the layout. The experimental results indicate that without increasing the chip size, the phase conflict problem can be well tackled with minimal perturbation to the layout.

Published in:

Design Automation Conference, 2008. ASPDAC 2008. Asia and South Pacific

Date of Conference:

21-24 March 2008

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.