Scheduled System Maintenance:
On May 6th, single article purchases and IEEE account management will be unavailable from 8:00 AM - 12:00 PM ET (12:00 - 16:00 UTC). We apologize for the inconvenience.
By Topic

On-Wafer Characterization of Varactor Using Resonating Microprobes

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Deleniv, A. ; Dept. of Microtechnol. & Nanosci. MC-2, Chalmers Univ. of Technol., Goteborg ; Vorobiev, A. ; Gevorgian, S.

An uncertainty analysis is developed for one-port Q-factor measurements. It is shown that better than 2% measurement accuracy is expected for high-Q resonators provided that the coupling is close to the critical. The developed uncertainty analysis is then used to define the measurement accuracy of the resonance technique, which is introduced here for on-wafer characterization of high-Q varactors. The approach is simple and is more accurate if compared to broadband impedance measurements. The utility/validity of the proposed approach is demonstrated via measurements of the test varactors based on thin BSTO film.

Published in:

Microwave Theory and Techniques, IEEE Transactions on  (Volume:56 ,  Issue: 5 )